Ellipsometric analysis of concentration gradients induced in semiconductor crystals by pulsed laser induced epitaxy

  • J. Schlipf, E. Martín, M. Stchakovsky, A. Benedetti, I. A. Fischer, J. Schulze, S. Chiussi
  • Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 37 (6), No 061213
  • DOI: doi.org/10.1116/1.5122777